Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace: Difference between revisions
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==C4 Furnace Aluminium Anneal== | ==C4 Furnace Aluminium Anneal== | ||
[[Image: | [[Image:C4helstak.jpg |thumb|300x300px|C4 Furnace Aluminium Anneal: positioned in cleanroom 2]] | ||
C4 Furnace Anneal Oxide is a Tempress horizontal furnace for annealing of silicon wafers. | C4 Furnace Anneal Oxide is a Tempress horizontal furnace for annealing of silicon wafers. | ||