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== Deposition of Aluminium Nitride ==
== Deposition of Aluminium Nitride ==


Write a short description of the process and how to perform the process.
AlN can be deposited by using sputtering method with AlN target or reactive sputtering method with Al target in mixtures of argon and nitrogen.      


*[[/AlN in PVD co-sputter|Al<sub>x</sub>N<sub>y</sub> in PVD co-sputter/evaporation]] <br/>
*[[/AlN in PVD co-sputter|Al<sub>x</sub>N<sub>y</sub> in PVD co-sputter/evaporation]] <br/>
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