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Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Paphol (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
912 edits
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Write a short description of the process and how to perform the process.
Write a short description of the process and how to perform the process.


*[[Specific Process Knowledge/Thin film deposition/Deposition of AlxNy|Al<sub>x</sub>N<sub>y</sub> in PVD co-sputter/evaporation]] <br/>
*[[/AlN in PVD co-sputter|Al<sub>x</sub>N<sub>y</sub> in PVD co-sputter/evaporation]] <br/>




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