Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride: Difference between revisions
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Write a short description of the process and how to perform the process. | Write a short description of the process and how to perform the process. | ||
*[[/ | *[[Specific Process Knowledge/Thin film deposition/Deposition of AlxNy|Al<sub>x</sub>N<sub>y</sub> in PVD co-sputter/evaporation]] <br/> | ||
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