Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*1- | *1-30 4" wafer (or 2" wafers) per run | ||
|- | |- | ||
|style="background:silver; color:black"|.|| style="background:LightGrey; color:black"|Substrate material allowed | |style="background:silver; color:black"|.|| style="background:LightGrey; color:black"|Substrate material allowed | ||