Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 190: | Line 190: | ||
3. Heat-up, 10 min | 3. Heat-up, 10 min | ||
4. | 4. Pump-down to 3 mBar | ||
5. HMDS prime, 5 min | 5. HMDS prime, 5 min | ||
| Line 190: | Line 190: | ||
3. Heat-up, 10 min | 3. Heat-up, 10 min | ||
4. | 4. Pump-down to 3 mBar | ||
5. HMDS prime, 5 min | 5. HMDS prime, 5 min | ||