Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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A console may be opened by clicking Console in the Hosts tab (small triangle above 'cpu disk') in the tree at the bottom of the workspace. In the console, Ctrl + p or n may be used to browse through previous commands. | A console may be opened by clicking Console in the Hosts tab (small triangle above 'cpu disk') in the tree at the bottom of the workspace. In the console, Ctrl + p or n may be used to browse through previous commands. | ||
= Checking the layout of the final mgn-file = | = Checking the layout of the final mgn-file in ACHK= | ||
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography/FilePreparation#top|Go to top of this page]]</span> | |||
The final check of pattern is performed clicking ‘Achk’ in the Analysis window: | The final check of pattern is performed clicking ‘Achk’ in the Analysis window: | ||