Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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== MULTIPASS and OVERLAP == | == MULTIPASS and OVERLAP == | ||
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography/FilePreparation#top|Go to top of this page]]</span> | |||
When defining the v30-file to be exposed, e.g. | When defining the v30-file to be exposed, e.g. | ||