Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro: Difference between revisions
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Several things are worth noting: | Several things are worth noting: | ||
* A peak table pops up above the spectrum. It contains information (which elements, fitted atomic percentages etc.) obtained in the automatic fitting routine. One can still scroll through the levels (if more levels in a depth profile are available) but the elements fitted will not change. | * A peak table pops up above the spectrum. It contains information (which elements, fitted atomic percentages etc.) obtained in the automatic fitting routine. One can still scroll through the etch levels (if more etch levels in a depth profile are available) but the elements fitted will not change. | ||
* Only a fraction of the peaks in the spectrum have labels. The reason is that only the peaks from the peak table have a label - the remaining peaks in the spectrum are NOT unidentified elements but peaks (core levels or Auger transitions) of the elements already identified in the peak table. | * Only a fraction of the peaks in the spectrum have labels. The reason is that only the peaks from the peak table have a label - the remaining peaks in the spectrum are NOT unidentified elements but peaks (core levels or Auger transitions) of the elements already identified in the peak table. | ||