Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro: Difference between revisions
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This generates a plot in which the atomic percentage of each peak is plotted as a function of etch time. | This generates a plot in which the atomic percentage of each peak is plotted as a function of etch time. | ||
[[File:XPS-basics06f.jpg| | [[File:XPS-basics06f.jpg|500px]] | ||
From this plot several points are open for discussion: | |||
; Which peaks to add | |||
: The two spin-orbit doublets Si2p and Cu2p should be treated differently. The Si2p peak is treated as one peak because of the small spin-orbit splitting | |||
From here the data may be exported to Excel or Word by using the options on the 'W Reporting' tab next to the 'Display Modes' in the upper right corner of the GUI. | From here the data may be exported to Excel or Word by using the options on the 'W Reporting' tab next to the 'Display Modes' in the upper right corner of the GUI. | ||