Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro: Difference between revisions
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In the peak list below all peaks associated to the elements chosen will pop up. If you add all peaks in the table they will be part of the quantification. There is no reason to fit all peaks for each element, therefore make sure to restrict the quantification to the same peaks as the ones in the list of high resolution spectra - in this case select the Si2p and Cu2p peaks. Once the correct peaks have been chosen, press 'Add peaks' and 'Close'. | In the peak list below all peaks associated to the elements chosen will pop up. If you add all peaks in the table they will be part of the quantification. There is no reason to fit all peaks for each element, therefore make sure to restrict the quantification to the same peaks as the ones in the list of high resolution spectra - in this case select the Si2p and Cu2p peaks. Once the correct peaks have been chosen, press 'Add peaks' and 'Close'. | ||
== Make a depth profile from survey spectrum == | |||
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics/1intro#top|Go to top of this page]]</span> | |||
With all peaks correctly identified and quantified, it is possible to make a depth profile from the data. First minimize the view to make the quadrants visible. Press 'Peak Table Profile' button as shown below and a window with different profile options will appear. Here, we select the 'Atomic %'. | |||
[[File:XPS-basics06e.jpg|700px]] | |||
This generates a plot in which the atomic percentage of each peak is plotted as a function of etch time. | |||
[[File:XPS-basics06f.jpg|700px]] | |||