Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres: Difference between revisions
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To analyze a single spectrum, select and maximize it. Before adding peaks to the spectrum, it is a good idea consider what you know about the sample. Here, I know that the sample has ALD deposited layers of ZnO and CuZn on top of a silicon substrate. I would therefore expect to see bulk silicon provided I sputter deep enough and oxidized silicon from the native oxide. Therefore, I scroll to a level where, preferably, both the oxidized Si2p and the bulk silicon Si2p are visible. In this case, it is level 35. | To analyze a single spectrum, select and maximize it. Before adding peaks to the spectrum, it is a good idea consider what you know about the sample. Here, I know that the sample has ALD deposited layers of ZnO and CuZn on top of a silicon substrate. I would therefore expect to see bulk silicon provided I sputter deep enough and oxidized silicon from the native oxide. Therefore, I scroll to a level where, preferably, both the oxidized Si2p and the bulk silicon Si2p are visible. In this case, it is level 35. | ||
<gallery | <gallery widths="350" heights="250" perrow="3"> | ||
Image:XPS-basics11a.jpg | Level 34 | Image:XPS-basics11a.jpg | Level 34 | ||
Image:XPS-basics11b.jpg | Level 35 | Image:XPS-basics11b.jpg | Level 35 | ||