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Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
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|6" wafer, no HMDS. 13 points on one wafer, exclusion zone 5mm
|6" wafer, no HMDS. 13 points on one wafer, exclusion zone 5mm
|}
|}
=Syringe processes=


==AZ 4562 coating (syringe)==
==AZ 4562 coating (syringe)==
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