Specific Process Knowledge/Characterization/XPS/Processing/Basics: Difference between revisions
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[[File:XPS-basics04.jpg|700px]] | [[File:XPS-basics04.jpg|700px]] | ||
As shown in the bottom of the image above, this experiment holds several levels - the reason is that the exeriment is a depth profile in which a repeated set of spectra of a sample are recorded as the surface is gradually removed by an ion bombardment. Scroll through the individual levels and see how the spectra change. Level 0 is the first spectrum. | As shown in the bottom of the image above, this experiment holds several levels - the reason is that the exeriment is a depth profile in which a repeated set of spectra of a sample are recorded as the surface is gradually removed by an ion bombardment. Scroll through the individual levels, either by using the 'Etch time' or 'Etch Level' scroll buttons and see how the spectra change. Level 0 is the first spectrum. | ||
In the top are several bottoms in the 'Analysis' toolbar. Click the leftmost one called Automatic Survey ID and a automated peak identification routine will commence. | If more levels (such as in a depth profile) are available, one can change the display mode: | ||
<gallery> | |||
Image:XPS-basics03display3.jpg | |||
Image:XPS-basics03display4.jpg | |||
Image:XPS-basics03display1.jpg | |||
Image:XPS-basics03display2.jpg | |||
</gallery> | |||
In the top are several bottoms in the 'Analysis' toolbar. Click the leftmost one called Automatic Survey ID and a automated peak identification routine will commence. The result is shown below: | |||
[[File:XPS-basics05.jpg|700px]] | |||
Several things are worth noting: | |||
* A peak table pops up above the spectrum. It contains information (which elements, fitted atomic percentages etc.) obtained in the automatic fitting routine. One can still scroll through the levels (if more levels in a depth profile are available) but the elements fitted will not change. | |||
* Only a fraction of the peaks in the spectrum | |||