Specific Process Knowledge/Characterization/XPS/Processing: Difference between revisions
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=== Basic instructions === | === Basic instructions === | ||
Click [[Specific Process Knowledge/Characterization/XPS/Processing/Basics|here]] to have a complete walk-through of an example. This includes | |||
* Open data file | |||
* Open and analyze survey spectrum | |||
* Analyze high resolution spectra of the individual spectra: | |||
** Add background | |||
** Add peaks | |||
** Quantify | |||
* Analyze depth profiles | |||
== Examples of data analysis == | == Examples of data analysis == | ||
*[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | *[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | ||