Jump to content

Specific Process Knowledge/Lithography/Coaters: Difference between revisions

← Older editNewer edit →
VisualWikitext
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
Line 13: Line 13:
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_RCD8|Spin Coater: RCD8]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_RCD8|Spin Coater: RCD8]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_.28Polymers.29|Manual Spinner (Polymers)]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater: Manual_All_Resists|Spin_Coater:Manual All Resists]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater: Manual_Standard_Resists|Spin_Coater:Manual Standard Resists]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin coater: Manual Labspin|Spin coater: Manual labspin]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin coater: Manual_Laurell|Spin coater: Manual Laurell]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]]</b>
|-
|-
Line 40: Line 40:
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Coating of all resists
*Coating of all resists
|style="background:WhiteSmoke; color:black"|
*Coating of
** CSAR
** ZEP
** HSQ (FOx)
**AZ 5214E resist
**AZ 4562 resist
**AZ MiR resist
**AZ nLOF resist
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Coating of all resist
*Coating of all resist
|style="background:WhiteSmoke; color:black"|
*Coating of
** UV sensetive resist
** E-beam resist
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Spraying imprint resist
*Spraying imprint resist
Line 61: Line 66:
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Cassette-to-cassette
* Cassette-to-cassette
|colspan="3" align="center"|Single substrate
|style="background:WhiteSmoke; color:black"|
* Single substrate
* Edge handling chuck
|colspan="2" align="center" style="background:WhiteSmoke; color:black"|Single substrate
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Can handle almost any sample size and shape
* Can handle almost any sample size and shape
Line 78: Line 86:
* PGMEA for backside rinse and edge-bead removal
* PGMEA for backside rinse and edge-bead removal
* PGMEA for spinner bowl cleaning and vapor tip bath
* PGMEA for spinner bowl cleaning and vapor tip bath
|colspan="3" rowspan="2" align="center"|Only manual dispense
|colspan="3" rowspan="2" align="center" style="background:WhiteSmoke; color:black"|Only manual dispense
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* No permanent media
* No permanent media
Line 119: Line 127:
*no
*no
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*optional
*no
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*no
*no
Line 142: Line 150:
*100 mm wafers
*100 mm wafers
*150 mm wafers
*150 mm wafers
*small pieces down to 10x10 mm2
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*50 mm wafers
*50 mm wafers
Line 179: Line 188:
*Silicon  
*Silicon  
*Glass
*Glass
|style="background:WhiteSmoke; color:black"|
*III-V materials
*Si, SiO2, SOI
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*All cleanroom materials
*All cleanroom materials
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*All cleanroom materials
*All cleanroom materials
|style="background:WhiteSmoke; color:black"|
*III-V materials
*Si, SiO2, SOI
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*All chemicals to be spray coated must be approved specifically for spray coating
*All chemicals to be spray coated must be approved specifically for spray coating
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Coaters"