Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''[[Specific_Process_Knowledge/Lithography/mrEBL6000|mr EBL 6000.1]]''' | |'''[[Specific_Process_Knowledge/Lithography/mrEBL6000|mr EBL 6000.1]]''' | ||
| | |Negative | ||
|[http://http://www.microresist.de/home_en.htm MicroResist] | |[http://http://www.microresist.de/home_en.htm MicroResist] | ||
|Standard negative resist | |Standard negative resist | ||