|
|
| Line 3: |
Line 3: |
| ==Atomika SIMS== | | ==Atomika SIMS== |
|
| |
|
| [[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]
| | '''We have decommissioned the SIMS we had at Danchip. We can guide you to another site for SIMS analysis. Information will come later.''' |
| | |
|
| |
|
| The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined. | | The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined. |
|
| |
| Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.
| |
|
| |
| '''The user manual and technical information and contact information can be found in LabManager:'''
| |
|
| |
| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=23 The Atomika SIMS in Labmanager]
| |
|
| |
| ==An overview of the performance of the SIMS==
| |
|
| |
| {| border="2" cellspacing="0" cellpadding="10"
| |
| |-
| |
| !style="background:silver; color:black;" align="left"|Purpose
| |
| |style="background:LightGrey; color:black"| Determination of atomic composition
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * Doping level
| |
| * Sample contamination
| |
| |-
| |
| !style="background:silver; color:black" align="left"|Performance
| |
| |style="background:LightGrey; color:black"|Measurement accuracy depends on
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * Which atoms to be analysed
| |
| * The sample morphology (flat samples are much more suited than particles)
| |
| |-
| |
| !style="background:silver; color:black" align="left" rowspan="3"|Process parameters
| |
| |style="background:LightGrey; color:black"| Ion gun parameters
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * Acceleration voltages and focusing lens parameters
| |
| * Gas inlet pressures and apertures
| |
| |-
| |
| |style="background:LightGrey; color:black"| Mass spectrometer parameters
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * Detector biases and range
| |
| * Scan parameters such as raster size, speeds and pattern
| |
| |-
| |
| |style="background:LightGrey; color:black"| Sample position
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * Angle towards spectrometer
| |
| * For non-conducting samples: Flood gun parameters
| |
| |-
| |
| !style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
| |
| |style="background:LightGrey; color:black"|Substrate material allowed
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *In principle all materials
| |
| |-
| |
|
| |
| |style="background:LightGrey; color:black"|Substrate size
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * The samples must be cut into 5x5 or 7x7 mm pieces
| |
| * Other types of samples must be mounted onto appropriately sized carriers
| |
| |-
| |
| |style="background:LightGrey; color:black"|Batch size
| |
| |style="background:WhiteSmoke; color:black"|
| |
| * The sample holder carries up to 6 samples at the time
| |
| |-
| |
|
| |
| |}
| |
Feedback to this page: click here
Atomika SIMS
We have decommissioned the SIMS we had at Danchip. We can guide you to another site for SIMS analysis. Information will come later.
The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.
