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Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="4" align="center"
{| border="2" cellspacing="0" cellpadding="2" align="center"
!width="100" style="background:silver; color:black" |
!width="100" style="background:silver; color:black" |
!width="250" style="background:silver; color:black" | SEM with EDX
!width="250" style="background:silver; color:black" | SEM with EDX
!width="250" style="background:silver; color:black" | SIMS
!width="250" style="background:silver; color:black" | SIMS
!width="250" style="background:silver; color:black" | XPS
!width="250" style="background:silver; color:black" | XPS (or ESCA)
|- valign="top"
|- valign="top"
! style="background:WhiteSmoke; color:black" width="60" | Full name  
! style="background:WhiteSmoke; color:black" width="60" | Full name  
! style="background:WhiteSmoke; color:black" | Energy Dispersive X-ray Analysis
! style="background:WhiteSmoke; color:black" | Energy Dispersive X-ray Analysis
! style="background:WhiteSmoke; color:black" | Secondary Ion Mass Spectroscopy
! style="background:WhiteSmoke; color:black" | Secondary Ion Mass Spectroscopy
! style="background:WhiteSmoke; color:black" | X-ray Photoelectron Spectroscopy
! style="background:WhiteSmoke; color:black" | X-ray Photoelectron Spectroscopy (or Electron Spectroscopy for Chemical Analysis)
|-  
|-  
! style="background:lightgrey; color:black" | Technique
! style="background:lightgrey; color:black" | Technique
| style="background:lightgrey; color:black" | Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these X-rays is characteristic of the element they emitted from.
| style="background:lightgrey; color:black" | The primary beam of high energy electrons used in the SEM for imaging impinges on the sample atoms and leaves them in an excited state. X-rays with a characteristic energy are generated in the relaxation process. The combination of the fine control of the primary beam offered by the SEM and the detection of the X-rays makes it possible to make point-like elemental analysis.
| style="background:lightgrey; color:black" | Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer.  
| style="background:lightgrey; color:black" | A beam of high energy ions (cesium or oxygen) is used for sputtering off surface atoms of the sample. The material coming off the sample in this process is analysed with a mass spectrometer.
| style="background:lightgrey; color:black" | Non destrucive method: X-rays are irridiating the sample, and the energy of edjected photoelectrons is measured. The elemental analysis is possible, since the binding energy of the electrons (and hence the energy of the emitted photoelectrons) are specific for each element.
| style="background:lightgrey; color:black" | In a process in which a monochromatic beam of X-rays irradiates the sample surface, electrons bound inside the sample are knocked free to become photoelectrons. Escaping the sample with characteristic energy, these electrons not only carries elemental information but also chemical information.
|-
|-
! style="background:WhiteSmoke; color:black" | What elements are detected
! style="background:WhiteSmoke; color:black" | What elements are detected
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| style="background:WhiteSmoke; color:black" | Quite fast and easy  
| style="background:WhiteSmoke; color:black" | Quite fast and easy  
|}
|}


== Energy Dispersive X-ray analysis (EDX) ==
== Energy Dispersive X-ray analysis (EDX) ==
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