Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

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 '''When the subprogram 'SETWFR' has found the P and Q marks'''
-When SETWFR executes successfully feedback the 'P mark offset' to the OFFSET in the sdf file and re-compile the mgn-file.
+When SETWFR has been executed succesfully, it will give you a corrected offset; use the offset in the section 'P-point mark measurement results' which can be found around halfways in the output (here highlighted with an arrow --->):
+{| class = "collapsible collapsed" width=100% style = "border-radius: 10px; border: 1px solid #CE002D;"
+! width=100% | ========= OUTPUT of SETWFR Final result ==================
+|-
+|
+<pre>
+[Measurement information]
+	Linear scaling value      = 1.000000
+	Start time                = Thu Aug  6 09:17:01 2015
+	End time                  = Thu Aug  6 09:18:02 2015
+	[Deflector]
+	P-point fine scan             = PDEF
+	Q-point fine scan             = PDEF
+	[Measurement condition information]
+	Material type                 = Wafer
+	Material size          [inch] = 4.0
+	Multi-piece window            = 4A
+	Measurement mode              = Semi-auto
+	AGC execution                 = No
+	Height measurement            = No
+	HEIGHT automatic calculation  = No
+	SUBHEI automatic calculation  = No
+	[Parameter for pattern writing height correction calculation]
+		PDEF   GAIN  X,Y           =       -9999       -10571
+		       ROT   X,Y           =       12605        12962
+		SUBDEF SHIFT X,Y           =          -3           11
+		       GAIN  X,Y           =        1677          649
+		       ROT   X,Y           =        -695         1043
+		The Objective lens         =       29866
+		DF offset                  =           0
+	Beam shift value after objective lens correction [nm] =         0.0          0.0
+	Beam shift value after DFOCUS OFFSET  correction [nm] =         0.0          0.0
+	Height                                           [um] =    0.000000
+	[Parameter for pattern writing height correction calculation]
+		PQ GAIN coefficient     [nm/100mm] = 5.567214e+02  5.567214e+02
+	[PDEF DAC value calculated from PQ GAIN/ROT]
+		PDEF   GAIN  X,Y           =          90           89
+		       ROT   X,Y           =       -5490        -5501
+	[SUBDEF DAC value calculated from PQ GAIN/ROT]
+		SUBDEF SHIFT X,Y           =           0            0
+		       GAIN  X,Y           =         -21          -12
+		       ROT   X,Y           =        -322          323
+	[PDEF DAC value calculated from lens4 + height]
+		PDEF   GAIN  X,Y           =           0            0
+		       ROT   X,Y           =           0            0
+	[SUBDEF DAC value calculated from lens4 + height]
+		SUBDEF SHIFT X,Y           =           0            0
+		       GAIN  X,Y           =           0            0
+		       ROT   X,Y           =           0            0
+	[Total component DAC value of PQ correction]
+		PDEF   GAIN  X,Y           =          90           89
+		       ROT   X,Y           =       -5490        -5501
+		SUBDEF SHIFT X,Y           =           0            0
+		       GAIN  X,Y           =         -21          -12
+		       ROT   X,Y           =        -322          323
+		The Objective lens         =           0
+		DF offset                  =           0
+	Material correction coefficient SHIFT X,Y        [nm] = 55513.827000  -40956.899500
+	                                GAIN  X,Y  [nm/100mm] =  556.721379   556.721379
+	                                ROT   X,Y       [rad] =   -0.005500    -0.005500
+	Material center position X,Y                     [um] =  90000.0000   55000.0000
+	Material rotation angle                      [degree] = -0.3151517494
+	Reference height                                 [um] =    0.000000
+	Average height                                   [um] =    0.000000
+	[P-point mark measurement result]
+	Design position (material coordinates)      X,Y[um] = -35000.0000      0.0000
+	Observation position (material coordinates) X,Y[um] = -34944.1516   -233.4722
+ --->   Offset                                      X,Y[um] =     55.8484   -233.4722
+	Mark rotation angle(+clockwise)            [degree] = -3.119790e-01
+	Height measurement                                  = No height measurement
+	Height                                         [um] = 0.000000e+00
+	[Q-point mark measurement result]
+	Design position (material coordinates)      X,Y[um] =  35000.0000      0.0000
+	Observation position (material coordinates) X,Y[um] =  35055.1792    151.5585
+	Offset                                      X,Y[um] =     55.1792    151.5585
+	Mark rotation angle(+clockwise)            [degree] = -3.308954e-01
+	Height measurement                                  = No height measurement
+	Height                                         [um] = 0.000000e+00
+	[P-point correction data]
+		PDEF   GAIN  X,Y           =      -10089       -10660
+		       ROT   X,Y           =       18095        18463
+		SUBDEF SHIFT X,Y           =          -3           11
+		       GAIN  X,Y           =        1698          661
+		       ROT   X,Y           =        -373          720
+		The Objective lens         =       29866
+		DF offset                  =           0
+	Beam shift value after objective lens correction [nm] =         0.0          0.0
+	Beam shift value after DFOCUS OFFSET  correction [nm] =         0.0          0.0
+	Height                                           [um] =    0.000000
+	P-point mark shift [um] =     55.3296,    -42.8961
+	HEIGHT
+		 The amount of minute compensation of a focus lens                [point] = 0
+		 The amount of minute compensation of beam position shift       X    [nm] = 0.0
+		                                                                Y    [nm] = 0.0
+		 The amount of minute compensation of a main deflector gain     X [point] = 0
+		                                                                Y [point] = 0
+		 The amount of minute compensation of a main deflector rotation X [point] = 0
+		                                                                Y [point] = 0
+	SUBHEI
+		 The amount of minute compensation of a sub deflector shift     X [point] = 0
+		                                                                Y [point] = 0
+		 The amount of minute compensation of a sub deflector gain      X [point] = 0
+		                                                                Y [point] = 0
+		 The amount of minute compensation of a sub deflector rotation  X [point] = 0
+		                                                                Y [point] = 0
+======================================================
+</pre>
+|-
+|}
+<br> <br>
 <br clear="all" />
@@ Line 443: / Line 575: @@
 [[File:RoughScanGain.png|400px|right]]
-'''If the program cannot find the marks''', you can either adjust the scan conditions, or gain settings. Also, test SETWFR again with 'OFFSET (P-mark)' from the pre-aligner output.
+'''If the program cannot find the marks''', the machine will ask you whether you wish to find the marks manually by using the SEM. Before you do that, adjust the parameters of SETWFR with one (or all) of the follwing things and execute SETWFR again:
-Find the mark manually and let SETWFR scan the mark to align the sample:
+# Increase the rough scan width of both P and Q mark to around 300 µm
+# Change the scan position of both P and Q mark so it scans the opposite arm as before, i.e. scans at -30 µm instead of +30 µm
+# Set the BE coarse gain to 60 in the rough scan of P and Q mark (see under 'Gain' tab)
+# Change the interlaced scan from 'X -> Y' to 'Y -> X', 'X only', or 'Y only' (see under 'Scan' tab)
-As a last alternative, you can chose to find the mark manually; this is however not recommended.
+If nothing of the above work, accept to find the mark manually by using the SEM. Please be aware that you should only '''roughly''' find the mark with the SEM, i.e. center it on the screen, and '''not''' align with the SEM.
-SETWFR will ask you whether you wish to find the mark manually, click OK.
+As a last alternative, you can chose to find the mark manually; SETWFR will ask you whether you wish to find the mark manually, click OK.
 *In 'sspvideo' click 'change/SEM'
@@ Line 459: / Line 593: @@
-Please note that you should NOT align with the SEM but only roughly center the mark so you are sure the mark will be scanned with your scan settings.
+Please note that '''you should not align with the SEM but only roughly center the mark so you are sure the mark will be scanned with your scan settings.'''