Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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Design position (material coordinates) X,Y[um] = -35000.0000 0.0000 | Design position (material coordinates) X,Y[um] = -35000.0000 0.0000 | ||
Observation position (material coordinates) X,Y[um] = -34944.1516 -233.4722 | Observation position (material coordinates) X,Y[um] = -34944.1516 -233.4722 | ||
---> Offset X,Y[um] = 55.8484 -233.4722 | |||
Mark rotation angle(+clockwise) [degree] = -3.119790e-01 | Mark rotation angle(+clockwise) [degree] = -3.119790e-01 | ||
Height measurement = No height measurement | Height measurement = No height measurement | ||