Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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The most important output of PDEFBE is the gain shift value which is 1.4 nm (in Y); the maximum allowable gain correction in this condition file (0.2nA ap5) is 6 nm. If PDEFBE did not reach a shift value below 6 nm within 3 retries, the | The most important output of PDEFBE is the gain shift value which is 1.4 nm (in Y); the maximum allowable gain correction in this condition file (0.2nA ap5) is 6 nm. If PDEFBE did not reach a shift value below 6 nm within 3 retries for this condition file, the scan position on the BE mark should be shifted or a new BE mark should be used instead. | ||
=== DISTMEM and DISTBE === | === DISTMEM and DISTBE === | ||