Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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= Transfer of cassettes between autoloader and e-beam writer = | = Transfer of cassettes between autoloader and e-beam writer = | ||
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[[File:ebxmenu.png|400px]] | |||
You can load the cassette into the e-beam writer from the loader control program (Ldr) from EBX Menu. This operation requires the autoloader to be in REMOTE. | You can load the cassette into the e-beam writer from the loader control program (Ldr) from EBX Menu. This operation requires the autoloader to be in REMOTE. | ||