Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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Load and unload of cassettes into the autoloader can only be done via the touch-screen on the autoloader itself. | Load and unload of cassettes into the autoloader can only be done via the touch-screen on the autoloader itself. | ||
To load a cassette: | '''To load a cassette into the autoloader:''' | ||
#Set the interface in LOCAL | #Set the interface in LOCAL by clicking REMOTE (clicking this button toggles between REMOTE and LOCAL) | ||
#Click OPEN and open the door | #Click OPEN and open the door | ||
#Carefully put the cassette onto the platform with the hook away from yourself | #Carefully put the cassette onto the platform with the hook away from yourself | ||
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To unload a cassette: | '''To unload a cassette from the autoloader:''' | ||
#Set the interface in LOCAL, by clicking REMOTE (clicking this button toggles between REMOTE and LOCAL) | #Set the interface in LOCAL, by clicking REMOTE (clicking this button toggles between REMOTE and LOCAL) | ||