Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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There are 3 types of overlap methods; for all 3 methods you define an overlap width: | There are 3 types of overlap methods; for all 3 methods you define an overlap width: | ||
standard: the overlap will be exposed with half dose both of field 1 and field2; | '''a)''' standard: the overlap will be exposed with half dose both of field 1 and field2; <br> | ||
interleaving: the overlap will be finger-jointed by field 1 and field 2; | interleaving: the overlap will be finger-jointed by field 1 and field 2; | ||
interleaving with extra field: the overlap will be finger-jointed by field 1, field 2 and an extra field 3, as illustrated below in figure c. | interleaving with extra field: the overlap will be finger-jointed by field 1, field 2 and an extra field 3, as illustrated below in figure c. | ||