Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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Observation position (material coordinates) X,Y[um] = -34944.1516 -233.4722 | Observation position (material coordinates) X,Y[um] = -34944.1516 -233.4722 | ||
<FONT COLOR="FFFFFF">Offset X,Y[um] = 55.8484 -233.4722</FONT> | <FONT COLOR="FFFFFF">Offset X,Y[um] = 55.8484 -233.4722</FONT> | ||
<span style="color:red">'''Offset X,Y[um] = 55.8484 -233.4722'''</span> | |||
Mark rotation angle(+clockwise) [degree] = -3.119790e-01 | Mark rotation angle(+clockwise) [degree] = -3.119790e-01 | ||
Height measurement = No height measurement | Height measurement = No height measurement | ||