Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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The SEM's at Danchip cover a wide range of needs both in the cleanroom and outside: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication. | The SEM's at Danchip cover a wide range of needs both in the cleanroom and outside: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication. | ||
The 'workhorse' SEM | At the turn of the year 2015-2016 we made a reorganisation of the SEM's at Danchip. The old workhorse SEM's (the Leo and Zeiss) that have excellently served the users of the cleanroom for many years will be given new roles. | ||
The Leo SEM is a very reliable and rugged instrument that provides high quality images of most samples. It will be exclusively dedicated to the users of the Raith E-beam lithography system so general imaging of user samples is no longer allowed. The SEM Supra 1 (formerly) | |||
The old 'workhorse' SEM t will cover most users needs is the [[/Leo|Leo SEM]]. It is a very reliable and rugged instrument that provides high quality images of most samples. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the [[/Leo|Leo SEM]]. As such, we prefer that new users that have no prior SEM experience get trained on the Leo SEM before they start using the other SEM's. | |||
The [[/Zeiss|Zeiss SEM]] and the [[/Supra60VP|Supra 60 VP SEM]] are both 'Supra VP' models from Carl Zeiss (a 40 and 60 respectively). As such they share a lot of similaritites but they also differ in some respects. The SmartSEM operator software installed on both these SEM's is also running on the Leo. This is very convenient as it allows the users to shift between instruments quite easily. | The [[/Zeiss|Zeiss SEM]] and the [[/Supra60VP|Supra 60 VP SEM]] are both 'Supra VP' models from Carl Zeiss (a 40 and 60 respectively). As such they share a lot of similaritites but they also differ in some respects. The SmartSEM operator software installed on both these SEM's is also running on the Leo. This is very convenient as it allows the users to shift between instruments quite easily. | ||
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SEM's at DTU Danchip: | SEM's at DTU Danchip: | ||
* [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=37| The SEM Leo page in LabManager], | * [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=37| The SEM Leo page in LabManager], | ||
* [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=275| The SEM | * [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=275| The SEM Supra 1 page in LabManager], | ||
* [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=327| The SEM Supra | * [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=327| The SEM Supra 2 page in LabManager], | ||
* [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | * [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=361| The SEM Supra 3 page in LabManager], | ||
SEM's at DTU-Cen: | SEM's at DTU-Cen: | ||