Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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[[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafer for the multipurpose annealing furnace.]] | [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafer for the multipurpose annealing furnace.]] | ||
The Multipurpose annealing furnace it made by the company ATV Technologie, and it was installed in the cleanroom in | The Multipurpose annealing furnace it made by the company ATV Technologie, and it was installed in the cleanroom in 2015. | ||
The purpose of the ATV Furnace is annealing and dry oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses. | The purpose of the ATV Furnace is annealing and dry oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses. | ||