Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
Appearance
| Line 74: | Line 74: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Si with native oxide | |Si with native oxide | ||
| | |78±1° | ||
|28/5 2015 | |28/5 2015 | ||
|taran | |taran | ||
| Line 118: | Line 118: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Si with native oxide | |Si with native oxide | ||
| | |70±1° | ||
|28/5 2015 | |28/5 2015 | ||
|taran | |taran | ||