Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

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	It is important to measure height over an area that cover the entire pattern to be exposed. Also, make sure not measure height too close to the rim of the cassette (0.5-1 cm depending on cassette) or at substrate positions where the laser beam is deflected from holes or mesas.		It is important to measure height over an area that cover the entire pattern to be exposed. Also, make sure not measure height too close to the rim of the cassette (0.5-1 cm depending on cassette) or at substrate positions where the laser beam is deflected from holes or mesas.

	~~If the HEIMAP subprogram finishes successfully but one or more measurement points turns out with 'Error', the system will focus the beam~~