Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 E-beam writer in LabManager] | # [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 E-beam writer in LabManager] | ||
# [[Specific_Process_Knowledge/Lithography/EBeamLithography/JBX9500Manual|User manual for JBX-9500 e-beam writer]] | |||
''' Supplementary manuals for sdf- and jdf-files and BEAMER can be found here: ''' | ''' Supplementary manuals for sdf- and jdf-files and BEAMER can be found here: ''' | ||