Specific Process Knowledge/Lithography: Difference between revisions
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!Pattern size range | !Pattern size range | ||
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*~ | *~1.25 µm and up | ||
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*~ | *~200 nm and up | ||
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*~ | *~12 nm - 1 µm | ||
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*~ | *~20 nm and up | ||
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*3D voxel through transparent substrate: 0.3 µm diameter; 0.6 µm high | *3D voxel through transparent substrate: 0.3 µm diameter; 0.6 µm high | ||