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Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions

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After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an empty cassette into the autoloader.
After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and leave the cassette on the designated table.


If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Danchip personel unmount your substrates.
If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Danchip personel unmount your substrates.
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