Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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*Open the Stage program from EBX menu | *Open the Stage program from EBX menu | ||
*In 'sspvideo' click beam/beam-off | *In 'sspvideo' click beam/beam-off | ||
'Move stage to mark position (setting/movement) | *'Move stage to mark position (setting/movement) | ||
*In 'sspvideo' click 'change/BE SEM' | *In 'sspvideo' click 'change/BE SEM' | ||
*open 'adjust' and 'Setting' and start the SEM. | *open 'adjust' and 'Setting' and start the SEM. | ||