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| | '''If the program does not find the mark''', try a larger scan width and execute AGCRG again, and/or try to scan 'Y only' instead. |
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| |Open and edit AGCRG, in the program window '''1'''Enter the measured (from pre-aligner output) P mark position '''2''' Click 'RG mark detect condition: Setting' and adjust scan width and position. Use a large scan width (200-600 microns). In 'Scan type' choose 'fine scan', 'box scan' and choose the correct mark (cross or L-shaped). Start with an 'X only' scan.
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| '''3''' Save and execute AGCRG ||If the program finds the mark, ask the program to transfer the gain settings to SETWFR P (both rough and fine) or SETWFR Q. Scan again with same settings but choose 'Y only' in the 'RG mark detect conditions'.
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| If the program does not find the mark, try a larger scan width and execute AGCRG again, and/or try to scan 'Y only' instead.
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| If the program does not find the mark you can find it manually using the SEM. Remember to minimise the use of SEM: | | If the program still does not find the mark you can find it manually using the SEM. Remember to minimise the use of SEM: |
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| *Open the Stage program from EBX menu | | *Open the Stage program from EBX menu |
