Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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#Open the exposure program, ‘Exp’, from the EBX Menu. | |||
#Find and load your magazine file: click ‘File/Magazine File’ and choose the magazine file from the location ‘/home/eb0/jeoleb/job/danchip’. | |||
#Check that the name of the desired magazine-file appears in the Magazine filename field, then click ‘Execute’. | |||
#Click ‘YES’ if you agree on the information in the ‘Pattern Writing Execution Check’-window. | |||
Before the exposure starts, some inital calibration will be performed such as CURRNT and HEIMAP. When measuring HEIMAP, the last saved condition of HEIMAP will be used. | Before the exposure starts, some inital calibration will be performed such as CURRNT and HEIMAP. When measuring HEIMAP, the last saved condition of HEIMAP will be used. | ||
After finished exposure, the machine will display whether the exposure succeeded. | After finished exposure, the machine will display whether the exposure succeeded. | ||