Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
Appearance
| Line 335: | Line 335: | ||
== SETWFR == | == SETWFR == | ||
[[File:SETWFR.png| | [[File:SETWFR.png|600px]] | ||
[[File:RoughScan.png|400px]][[File:RoughScanGain.png|400px]] | |||
Before saving your condition file you should run the sub program 'SETWFR'. | Before saving your condition file you should run the sub program 'SETWFR'. | ||