Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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= Optical pre-alignment of wafers = | = Optical pre-alignment of wafers = | ||
[[File:prealign1.jpg|600px|right]] | |||
1. Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards the wall. | 1. Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards the wall. | ||
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Load and unload of cassettes into/from the e-beam writer | Load and unload of cassettes into/from the e-beam writer | ||
= Load and unload of cassettes into/from autoloader = | = Load and unload of cassettes into/from autoloader = | ||