Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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Seen from the front-side of the cassette with the hook to the right, the workpiece windows (wafer positions) are named A, B, C etc in reading-direction from top left to bottom right. | Seen from the front-side of the cassette with the hook to the right, the workpiece windows (wafer positions) are named A, B, C etc in reading-direction from top left to bottom right. | ||
[[File:CassetteMount.png|600px]] | |||
[[File:CassetteMount2.png|600px]] | |||
= Optical pre-alignment of wafers = | = Optical pre-alignment of wafers = | ||