Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions

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	= Mounting of chips or wafers into cassette =		= Mounting of chips or wafers into cassette =

	NOTE that wafers are mounted with major flat upwards and your pattern ~~should thus be~~ designed in the same way.		NOTE that wafers in some cassette are mounted with major flat upwards and in some cassette mounted with flat down-ward. Make sure your pattern is designed in the same way.