Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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To request for an e-beam training session, contact [mailto:e-beam@danchip.dtu.dk e-beam@danchip.dtu.dk]; a DTU Danchip personnel will hereafter provide a time slot. Users require '''at least 4 training sessions''' before being allowed full acccess to the machine. The first training will focus on file preparation and compilation alone. | To request for an e-beam training session, contact [mailto:e-beam@danchip.dtu.dk e-beam@danchip.dtu.dk]; a DTU Danchip personnel will hereafter provide a time slot. Users require '''at least 4 training sessions''' before being allowed full acccess to the machine. The first training will focus on file preparation and compilation alone. | ||
'''It takes several months to get full authorization to the machine. Therefore, if you are either in a hurry, or a visiting researcher, or only require a few e-beam exposures to fulfill your project, let one of your authorized colleagues expose for you.''' | |||
Before you request for a training on the machine, fulfill the following steps: | Before you request for a training on the machine, fulfill the following steps: | ||