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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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DCH-Employees-701
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After converting to v30-format, the dose variation is illustrated in your pattern:
BEAMER has at this point created a jdi-file in the same folder as the v30-file. This jdi-file is the shot modulation that should be inserted in the jdf-file (see section 4 in the sdf- and jdf-file preparation manual). The jdi-file opens with SuperEdi.


= Bulk and sleeve =
= Bulk and sleeve =
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