Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

@@ Line 308: / Line 308: @@
 {| cellpadding="2" style="border: 2px solid darkgray;" align="right"
-! width="400" |
+! width="350" |
 ! width="150" |
 ! width="150" |
@@ Line 319: / Line 319: @@
 |
 |- align="center"
-| 2" Ti cassette || 2" Al cassette || 4" Ti cassette || 42 Al cassette
+| 2" Ti cassette; wafers are mounted flat-up || 2" Al cassette; wafers are mounted flat-down || 4" Ti cassette || 42 Al cassette
 |}