Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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<pre> | <pre> | ||
Module | Module Function | ||
Import | Import Imports a GDS, CIF or v30-file | ||
Export | Export Exports to GDS, CIF or v30-format | ||
Grid | Grid Modifies the base unit of the imported file | ||
Fracture | Fracture Optimizes the fracturing of the layout | ||
Heal | Heal Removes overlaps in the layout and joins abutting polygons | ||
Bias | Bias Adds or subtracts geometrical bias to the pattern | ||
Merge | Merge Merges two layouts | ||
Minus | Minus Subtracts two layouts | ||
PEC | PEC Proximity Error Correction | ||
Split | Split Splits the output in two | ||
</pre> | </pre> | ||
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[[File:beamer10.jpg|400px]] | [[File:beamer10.jpg|400px]] | ||
By clicking on active modules, the layout of the file becomes visible in the layout view area. | By clicking on active modules, the layout of the file becomes visible in the layout view area. | ||
= Simple conversion from GDSII to v30 = | = Simple conversion from GDSII to v30 = | ||