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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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<pre>
<pre>
  Module Function
  Module     Function
  Import Imports a GDS, CIF or v30-file
  Import     Imports a GDS, CIF or v30-file
  Export Exports to CIF or v30-format
  Export     Exports to GDS, CIF or v30-format
  Grid Modifies the base unit of the imported file
  Grid     Modifies the base unit of the imported file
  Fracture Optimizes the fracturing of the layout
  Fracture   Optimizes the fracturing of the layout
  Heal Removes overlaps in the layout and joins abutting polygons
  Heal     Removes overlaps in the layout and joins abutting polygons
  Bias Adds or subtracts geometrical bias to the pattern
  Bias     Adds or subtracts geometrical bias to the pattern
  Merge Merges two layouts
  Merge     Merges two layouts
  Minus Subtracts two layouts
  Minus     Subtracts two layouts
  PEC Proximity Error Correction
  PEC     Proximity Error Correction
  Split Splits the output in two
  Split     Splits the output in two
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[[File:beamer10.jpg|400px]]
[[File:beamer10.jpg|400px]]


By clicking on active modules, the layout of the file becomes visible in the layout view area.  
By clicking on active modules, the layout of the file becomes visible in the layout view area.


= Simple conversion from GDSII to v30 =
= Simple conversion from GDSII to v30 =