Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
Created page with "=Introduction= The BEAMER software is used to convert files from GDSII format to v30-format. The BEAMER software is manufactured by GenISys (www.genisys-gmbh.de) and the soft..." |
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To use the modules, they are dragged to the process flow area. | To use the modules, they are dragged to the process flow area. | ||
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The inputs and outputs of each module are illustrated by white tags. Two modules are coupled to each other by positioning the input of e.g. the Export module on top of the output of the Import module. The input/output tags turns black when they are connected. | The inputs and outputs of each module are illustrated by white tags. Two modules are coupled to each other by positioning the input of e.g. the Export module on top of the output of the Import module. The input/output tags turns black when they are connected. | ||
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By clicking on active modules, the layout of the file becomes visible in the layout view area. | By clicking on active modules, the layout of the file becomes visible in the layout view area. | ||
= Simple conversion from GDSII to v30 = | = Simple conversion from GDSII to v30 = | ||
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# Import a GDSII-file by dragging the 'Import' module to the process flow area. Select the file. In the 'Import Layout' window, type the layer number to import or type * if you wish to import all layers. | # Import a GDSII-file by dragging the 'Import' module to the process flow area. Select the file. In the 'Import Layout' window, type the layer number to import or type * if you wish to import all layers. | ||
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# Export the GDSII file to v30 by dragging an 'Export' module on top of the 'Import' icon. An 'Export JEOL' window appears. In the tab 'General' of this export window, choose JBX9300FS (100kV). | # Export the GDSII file to v30 by dragging an 'Export' module on top of the 'Import' icon. An 'Export JEOL' window appears. In the tab 'General' of this export window, choose JBX9300FS (100kV). | ||
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