Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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+= Troubleshooting =
+If the sdf- and jdf-files do not compile correctly with the v30-files, the EWS/9500 will come out with an error message that might be a bit difficult to comprehend. If this happens, check that these things are ok:
+# The names of the sdf- and jdf-files might be too long; the maximum number of characters is not specified anywhere in the JEOL manual, but keep the names shorter than 20 characters to be sure.
+# The sdf-, jdf-, or v30-file might not exist or might be located in the wrong directory; see section 1.1 in this manual to see where they should be located.
+# The compilation command 'schd' is performed from the wrong directory, see section 1.1 in this manual to see from where it should be called.
+# The order of commands might be wrong in either the sdf- or jdf-file; check the order of commands in the templates in the directory home/eb0/jeoleb/job/templates
+# The sdf- or jdf-files might have been opened in a text-program different from SuperEdi, e.g. notepad; this can corrupt the files and add linefeeds or tokens at line-ends. This can be checked in SuperEdi. In most cases, the problem can be solved by opening the sdf- and jdf-file in SuperEdi and save it again while setting the line endings to UNIX.
+# The path writing requires a scan speed larger than 100MHz; increase the shot pitch (SHOT) in the sdf-file and compile again.