Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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== Simple sdf and jdf files == | == Simple sdf and jdf files == | ||
'''sdf-file ''' | |||
The sdf-file contains a series of commands and parameters that specifies jdf filename, type | The sdf-file contains a series of commands and parameters that specifies jdf filename, type | ||
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If the next user of the machine has loaded a cassette in slot #10 and you wish to load that cassette after exposure, you can finalize the sdf-file with 'END 10'. | If the next user of the machine has loaded a cassette in slot #10 and you wish to load that cassette after exposure, you can finalize the sdf-file with 'END 10'. | ||
'''jdf-file''' | |||
The jdf-file contains a series of commands and parameters that specifies what pattern (v30-file) is to be written where on the sample. It also specifies what calibrations are to be performed during writing. | The jdf-file contains a series of commands and parameters that specifies what pattern (v30-file) is to be written where on the sample. It also specifies what calibrations are to be performed during writing. | ||
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___________________________________________________________________________ | ___________________________________________________________________________ | ||
== Calibration during writing (PATH)== | == Calibration during writing (PATH)== | ||