Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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== Calibration during writing (PATH)== | |||
The inital and cyclic calibration before and during an e-beam run is defined in the jdf-file, e.g. by 'PATH DRF5M'. | |||
Every time a jdf-file is called from a sdf-file, i.e. for every sequence defined in the sdf-file, the inital calibration specified in the jdf-file will be executed. Therefore, in order to save writing time, design your files so as to keep as few sequences in the sdf-file as possible. | |||
There are a number of calibration programs to chose from, the DRF5M is recommended when no alignment is required and FT01 recommended if alignment is required: | |||
<pre> | |||
auto calib file calibrations | |||
DRF5M INITIAL: HEIMAP, CURRNT, DRIFT | |||
CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field) | |||
FT01 INITIAL: CURRNT, DRIFT | |||
CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field) | |||
DTU5M INITIAL: HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | |||
CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field) | |||
HEI INITIAL: HEIMAP | |||
CYCLIC: CURRNT (every 10 minutes) | |||
</pre> | |||
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note 2: Always add 10% to the current in this command to make sure you work well below 100 MHz and thus will not be affected if the current fluctuates above the base current. | note 2: Always add 10% to the current in this command to make sure you work well below 100 MHz and thus will not be affected if the current fluctuates above the base current. | ||
== Dose variation == | == Dose variation == | ||