Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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A console may be opened by clicking Console in the Hosts tab (small triangle above 'cpu disk') in the tree at the bottom of the workspace. In the console, Ctrl + p or n may be used to browse through previous commands. | A console may be opened by clicking Console in the Hosts tab (small triangle above 'cpu disk') in the tree at the bottom of the workspace. In the console, Ctrl + p or n may be used to browse through previous commands. | ||
== Checking the layout of the final mgn-file == | |||
The final check of pattern is performed clicking ‘Achk’ in the Analysis window: | |||
# Open the mgn-file to inspect. Click on the pattern once (the pattern area turns red) and click ‘View/Shot Shape Display...’ to look at the actual pattern. | |||
# Mark ‘Colored shot rank’ and ‘Fill in a pattern’ and select ‘ASD’ under ‘Shot form’. In order to see individual shots, zoom in and select a structure. | |||
# Click the ‘Simulation ...’ button to select the correct Objective aperture. The simulated beam diameter will be displayed in the simulation window | |||
Check that the pattern has not shifted in coordinates: In case it has, the pattern can be shifted back by manually changing the array-parameters in the jdf-file, or the SHIFT coordinates in the sdf-file | |||
When the pattern is accepted by user, the e-beam exposure can start. | |||