Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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Using the 'RESTOR' command without '1' the condition file will be restored without demagnetizing of the lenses. | Using the 'RESTOR' command without '1' the condition file will be restored without demagnetizing of the lenses. | ||
== Compiling to mgn == | |||
Prepare jdf- and sdf-files according to the sections above. | |||
Open FFFTP from the desktop of e.g. DCH1350 and connect to 9500. Move the jdf, adf and v30 files to the 9500 computer. The files should be located here before final compilation: | |||
file type and its location (9500 computer) | |||
<pre> | |||
sdf home/eb0/jeoleb/job/danchip | |||
jdf home/eb0/jeoleb/job/danchip | |||
v30 home/eb0/jeoleb/pattern/danchipv30 | |||
</pre> | |||
The sdf-file (with name 'sdfname.sdf'), the jdf-file (with name 'jdfname.jdf') and the v30-files are checked or compiled from a terminal from the location (DTU)/job/danchip with the following commands: | |||
command | |||
<pre> | |||
cmpl jdfname Compiles the jdf-file alone, creates a lyr-file | |||
schd sdfname Final compilation of sdf, jdf and v30-files, creates a mgn-file | |||
schd -exptim sdfname Final compilation of sdf, jdf and v30-files, creates a mgn-files and states the writing time estimate | |||
wrtestui Opens a user interfaces wherefrom writing time etismation of a mgn-file can be estimated | |||
</pre> | |||
After exposure, the sdf, jdf, and mgn-files are moved to this directory: home/eb0/jeoleb/job/danchipoldfiles. | |||
A console may be opened by clicking Console in the Hosts tab (small triangle above 'cpu disk') in the tree at the bottom of the workspace. In the console, Ctrl + p or n may be used to browse through previous commands. | |||